2,808
edits
Changes
→7.2 Coatings from the Gaseous Phase (Vacuum Deposition)
The sputtering process has gained the economically most significant usage. Its process principle is illustrated in <xr id="fig:Principle of sputtering"/> (Fig. 7.5).
</figure>
Initially a gas discharge is ignited in a low pressure (10 – 1 Pa) argon atmosphere. The argon ions generated are accelerated in an electric field and