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Principle of sputtering Ar = Argon atoms; e = Electrons; M = Metal atoms
== Summary ==
Principle of sputtering Ar = Argon atoms; e = Electrons; M = Metal atoms
== Licensing ==
{{CC-by-sa-4.0}}
Principle of sputtering Ar = Argon atoms; e = Electrons; M = Metal atoms
== Licensing ==
{{CC-by-sa-4.0}}